| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic levitation device that can increase allowable load weight. <P>SOLUTION: In this ultrasonic levitation device that comprises a fixed portion 1, a moving portion 9 set so as to be movable to the fixed portion 1, and a vibration generating device 13 provided on the fixed portion 1 or the moving portion 9 to generate ultrasonic vibrations and configured to levitate the moving portion 9 via a levitation surface by the ultrasonic vibrations of the vibration generating device 13, the main vibrations of the ultrasonic ones generated by the vibration generating device 13 involves secondary vibrations. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
