发明名称 Index error estimating apparatus, index error calibrating apparatus, and index error estimatng method
摘要 An index error estimating apparatus used for an index error calibrating apparatus (1) that has a grating disk (2) supported by a rotation shaft (22) and four detectors (3) arranged on the grating disk. The index error estimating apparatus includes a detected value synthesizer (41) that calculates a linear sum by multiplying by a predetermined coefficient each of detected values obtained from each of the at least four detectors; and a Fourier component identifier that uses a Fourier component of the linear sum and identifies a Fourier component of the index error.
申请公布号 EP2549241(B1) 申请公布日期 2015.01.07
申请号 EP20120175348 申请日期 2012.07.06
申请人 MITUTOYO CORPORATION 发明人 NARA, MASAYUKI
分类号 G01D5/38 主分类号 G01D5/38
代理机构 代理人
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