| 摘要 |
<p>The present invention relates to a plasma chemical vapor apparatus and an electrode unit for a plasma chemical vapor apparatus. The electrode unit includes: a hollow electrode with a polygonal cross section disposed to be rotatable, and has an outer side surface formed into a plurality of planes; and at least one magnetic field generating member provided in the electrode to form a magnetic field toward a base material side. According to the present invention, electrode cleaning and replacement cycles are extended to significantly improve the efficiency of production, particle generation, and minimize the generation of abnormal arc.</p> |
