| 摘要 |
The present invention relates to a drawing apparatus, and a method of manufacturing an article. The drawing apparatus for performing drawing on a substrate with a charged particle beam, includes a controller configured to control a dose of the charge particle beam at each of a plurality of positions of the charged particle beam on the substrate based on information of displacement of each of the plurality of positions from a target position corresponding thereto and a target dose of the charged particle beam at the target position corresponding to each of the plurality of positions. |
