| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray generator capable of acquiring accurate position information of a target body.SOLUTION: An X-ray generator 1 includes an electron gun 3 for emitting an electron beam EB, a substrate 21 composed of diamond, a coil part 9 capable of deflecting the electron beam EB emitted from the electron gun 3 in one direction along an incident plane of the electron beam EB of the substrate 21 and in a vertical direction to the one direction, and a controller 33 for controlling the coil part 9 by outputting to the coil part 9 a control signal for deflecting in the one direction or a control signal for deflecting in the vertical direction to the one direction, and a current detector 31 for detecting a target current from the substrate. The controller 33 acquires position information of a target body 23 on the basis of the target current detected by the current detector 31. Any waveform of the control signal has a predetermined period from falling of the waveform to rising after the falling, or from rising of the waveform to falling after the rising.</p> |
