SCANNING-ELECTRON-MICROSCOPE IMAGE PROCESSING DEVICE AND SCANNING METHOD

摘要

The image processing device has: a scanning direction decision unit which divides an captured image into a plurality of scanning regions and deciding a scanning direction of each scanning region based on a pattern edge captured in each scanning region in the captured image, a scanning order decision unit which performs a raster scan per pixel constituting each scanning region such that the scanning direction of each of the decided scanning region is directed to a horizontal direction of the raster scan, and a scanning image acquisition unit which acquires a scanning image by capturing each scanning region by the scanning-electron-microscope based on the decided scanning order.

主权项

1. An image processing device that processes image data captured by irradiating an electron beam of a scanning-electron-microscope on a captured object comprising:
a captured image acquisition unit that acquires a captured image by capturing a captured region including a pattern edge of the captured object by the scanning-electron-microscope; a scanning direction decision unit that divides the acquired captured image into a plurality of scanning regions and decides a scanning direction of each scanning region based on the pattern edge captured in each scanning region in the captured image; a scanning order decision unit that decides a scanning order for a raster scan per pixel constituting each scanning region such that the scanning direction of each of the decided scanning regions is directed to a horizontal direction of the raster scan; and a scanning image acquisition unit that acquires a scanned image by capturing each scanned region by the scanning-electron microscope based on the decided scanning order.