ELEVATOR LINEAR MOTOR DRIVE

摘要

Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.

主权项

1. A system for transporting a substrate in a substrate processing system having at least one chamber, comprising:
tracks positioned within the chamber; a substrate carrier mounted onto the tracks for transporting the substrate; a plurality of magnetic elements attached to the carrier; a linear motor; a plurality of magnetic conduits positioned between the linear motor and the carrier, wherein the magnetic conduits are positioned so as to transmit the magnetic force from the linear motor to the underside of the carrier to thereby create magnetic coupling to transport the carrier and to enhance the stability of the carrier by enhancing the gravitational force on the carrier.