Fe-Co-BASED ALLOY SPUTTERING TARGET MATERIAL AND PRODUCTION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an Fe-Co-based alloy sputtering target material suitable for forming a soft magnetic film having high smoothness, and to provide a production method thereof.SOLUTION: In an Fe-Co-based alloy sputtering target material, the composition formula in the atomic ratio is expressed as follows: (Fe-Co)-Zr-W, 30≤x≤80, 7≤y≤18, 7≤z≤18, and the balance comprises inevitable impurities, and y and z in the composition formula satisfy following proportional expression: y:z=1:1 to 1:3. Preferably, the deflection strength is 400 MPa or higher.