MANUFACTURING METHOD OF PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC ACTUATOR, AND LIQUID DISCHARGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which improves the conduction reliability in a sub-electrode part having a small width.SOLUTION: A piezoelectric actuator 21 is joined to an upper surface of a passage unit 20 so as to cover multiple pressure chambers 26. The piezoelectric actuator 21 includes: a piezoelectric material 40 composed of three piezoelectric layers 41 to 43; multiple individual electrodes 44; a first common electrode 45; and a second common electrode 46. A process for forming the individual electrodes 44 includes: an electrode body layer formation step where an electrode body layer 53 having a main electrode part 53a and a sub-electrode part 53b having a width smaller than the main electrode part 53a is formed by screen printing; and a partial electrode layer formation step where a partial electrode layer 54 is formed by screen printing so that the partial electrode layer 54 is overlapped with the sub-electrode part 53b.