WATER-SOLUBLE WORKING FLUID FOR FIXED ABRASIVE GRAIN WIRE SAW

摘要

Provided is a water-soluble working fluid for a fixed-abrasive wire saw, the water-soluble working fluid comprising: (C) a carboxylic acid; (D) a compound which shows basicity on dissolution in water; and (E) water, wherein an electrical conductivity at 25°C of the water-soluble working fluid is 300 µS/cm or more and 3000 µS/cm or less; a pH at 25°C of the water-soluble working fluid is 5 or more and 10 or less; and a viscosity of a simulated fluid formed by adding 10 mass % of a silicon powder having an average particle size of 1.5 µm to the water-soluble working fluid and stirring a resultant mixture is less than 30 mPa·s at 25°C.