CALLIBRATION BLOCK FOR MEASURING WARPAGE, WARPAGE MEASURING APPARATUS USING THEREOF AND METHOD THEREOF
摘要
<p>The present invention relates to a calibration block for measuring warpage, and a warpage measuring device and method using the same. The calibration block for measuring warpage comprises: a substrate having one surface which is flat; and a stepped part which is formed in the center of the other surface of the substrate.</p>
申请公布号
KR20140142575(A)
申请公布日期
2014.12.12
申请号
KR20130064177
申请日期
2013.06.04
申请人
SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人
WOO, SEUNG WAN;NAM, JU WAN;HWANG, YOUNG NAM;LEE, KYUNG HO;HAM, SUK JIN
