METHOD FOR PRODUCING CATALYTIC METAL LAYER AND METHOD FOR PRODUCING GRAPHENE MATERIAL

摘要

A rectangular substrate 12 composed of c-plane sapphire is prepared. Nickel serving as a catalytic metal is deposited on the entirety of an upper surface of the substrate 12 to form a catalytic metal film 14 (see (a)). The catalytic metal film 14 is patterned by a lithography method into a catalytic metal film 16 having a predetermined shape (see (b)). The temperature of the catalytic metal film 16 is raised to 1000° C. and maintained at 1000° C. for 20 minutes. The temperature of the catalytic metal film 16 is lowered from 1000° C. to 800° C. at a rate of 5° C./min. The temperature of the catalytic metal film 16 is maintained at 800° C. for 15 hours. Thereby, a catalytic metal layer 17 having large grains is provided (see (c)).

主权项

1. A method for producing a catalytic metal layer, comprising the steps of:
(a) forming a film composed of a catalytic metal on a substrate, the catalytic metal having the function of promoting graphenization; (b) raising the temperature of the catalytic metal to a heating temperature in a high-temperature region where a high affinity between the catalytic metal and the substrate is achieved; (c) lowering the temperature of the catalytic metal from the heating temperature to a low-temperature region where a misfit dislocation is introduced between the substrate and the catalytic metal, and lowering the temperature of the catalytic metal so as to satisfy at least one of a first requirement in which the temperature of the catalytic metal is lowered at a rate of temperature decrease of 2° C./min or more while the temperature of the catalytic metal is in an intermediate-temperature region having a temperature lower than the heating temperature and higher than the low-temperature, and a second requirement in which the temperature of the catalytic metal is lowered in such a manner that the length of time that the temperature of the catalytic metal is in the intermediate-temperature region is within 50 minutes; and (d) crystallizing the catalytic metal into a catalytic metal layer while the temperature of the catalytic metal is a temperature equal to or lower than the upper limit of the low-temperature region.