| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device capable of, when inputting a photomask blank to a production device, easily discriminating an orientation of the photomask and inputting in an optimal direction.SOLUTION: An orientation discrimination device for a photomask blank discriminates a direction or a front and back of a photomask blank. The orientation discrimination device includes: a stage for mounting a photomask blank; a sensor for detecting a processing portion of each corner part of the photomask blank; and an orientation discrimination part for referring to a pattern table which is information for discriminating an orientation of the photomask blank, according to a detection result of the sensor with regard to the processing portion of each corner part and a location of the processing portion. The sensor is a contact type sensor.</p> |
