| 发明名称 |
THERMAL CONVECTION TYPE LINEAR ACCELEROMETER |
| 摘要 |
A thermal convection type linear accelerometer includes a substrate and a first sensing device. The first sensing device includes two first temperature-sensing components and a first heater. The two first temperature-sensing components are disposed on the substrate. The first heater is disposed on the substrate. The first heater is located between the two first temperature-sensing components. The two first temperature-sensing components are higher than the first heater relative to the substrate. |
| 申请公布号 |
US2014360267(A1) |
申请公布日期 |
2014.12.11 |
| 申请号 |
US201414301648 |
申请日期 |
2014.06.11 |
| 申请人 |
CHUNG HUA UNIVERSITY |
发明人 |
LIN JIUM MING |
| 分类号 |
G01P15/00 |
主分类号 |
G01P15/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A thermal convection type linear accelerometer comprising:
a substrate; and a first sensing device comprising:
two first temperature-sensing components disposed on the substrate; anda first heater disposed on the substrate and between the two first temperature-sensing components, wherein a height of at least one of the two first temperature-sensing components relative to the substrate is greater than a height of the first heater relative to the substrate. |
| 地址 |
HSINCHU TW |
