CUBICLE APPARATUS AND DEPOSITION APPARATUS WITH THE SAME
摘要
<p>A crucible apparatus and a deposition apparatus including the same include a thermo ball in a crucible and form a film with a uniform thickness by stably supplying heat to a metal material and an organic material in a deposition process by injecting the thermo ball into the crucible. Also, the crucible apparatus and the deposition apparatus including the same according to the embodiments of the present invention prevent the crucible from being damaged due to the difference of the thermal expansion coefficients of the metal material and the crucible in a cooling process by injecting the thermo ball into the crucible.</p>
