发明名称 SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor storage device and a manufacturing method of the same, which can reduce channel resistance between electrodes.SOLUTION: A semiconductor storage device comprises: a lower gate layer; a laminate having a plurality of electrode layers and a plurality of insulation layers, which are alternately laminated on the lower gate layer; a channel body extending through the laminate from the electrode layer, a top layer, toward the lower gate layer; and a memory film which is provided between the electrode layer and the channel body, and includes a charge storage film. The electrode layer has a stepped part where a level difference is formed in a lamination direction of the laminate. The channel body and the memory film penetrate the stepped part.
申请公布号 JP2014229740(A) 申请公布日期 2014.12.08
申请号 JP20130108059 申请日期 2013.05.22
申请人 TOSHIBA CORP 发明人 KUGE NOBUHITO;NAKAI TSUKASA
分类号 H01L21/336;H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/336
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