发明名称 ALIGN EQUIPMENT OF GLASS AND MASK
摘要 Disclosed is a device for aligning a glass and a mask. A device for aligning a glass and a mask according to an embodiment of the present invention, includes a stage unit including a plurality of elevating contact modules which mutually touches a plurality of regions of a first object loaded in a deposition chamber, wherein the elevating contact modules is mounted to be elevated in the deposition chamber; a horizontality adjusting unit which includes an elevating driving module which selects at least one of the elevating contact modules and moves the elevating contact module in a vertical direction and can adjust horizontality of the first object by operating the elevating driving module; and a position aligning unit which is combined with the elevating driving module and rotates or moves a stage unit on a predetermined plane to align the firs object on a second object which is separated from the first object.
申请公布号 KR20140137873(A) 申请公布日期 2014.12.03
申请号 KR20130059050 申请日期 2013.05.24
申请人 SFA ENGINEERING CORP. 发明人 LEE, DONG HO;YOO, WOO JONG
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
代理机构 代理人
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