发明名称 |
METHOD OF PATTERNING A DEVICE |
摘要 |
A fluorinated photopolymer is formed on a device substrate and exposed to patterned radiation. The photopolymer has a total fluorine content in a weight range of 15 to 60% and comprises at least three distinct repeating units, including a first repeating unit having a fluorine-containing group, a second repeating unit having an acid- or alcohol-forming precursor group, and a third repeating unit different from the first and second repeating units. The pattern-exposed photopolymer layer is contacted with a developing solution comprising at least a first fluorinated solvent that dissolves the unexposed photopolymer thereby forming a developed structure having a first pattern of photopolymer covering the substrate and a complementary second pattern of uncovered substrate. The developing solution is selected to provide a maximum photopolymer contrast in a range of 1.9 to 5.0. |
申请公布号 |
US2014342287(A1) |
申请公布日期 |
2014.11.20 |
申请号 |
US201414260705 |
申请日期 |
2014.04.24 |
申请人 |
Orthogonal, Inc. |
发明人 |
Wright Charles Warren;Freeman Diane Carol;Byrne Frank Xavier;DeFranco John Andrew;Rubsam Sandra;O'Toole Terrrence Robert;Robello Douglas Robert |
分类号 |
G03F7/038;G03F7/42;G03F7/20 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
1. A method of patterning a device comprising:
providing a layer of a fluorinated photopolymer over a device substrate, the fluorinated photopolymer comprising at least three distinct repeating units, including a first repeating unit having a fluorine-containing group, a second repeating unit having an acid- or alcohol-forming precursor group, and a third repeating unit different from the first and second repeating units, wherein the photopolymer has a total fluorine content in a weight range of 15 to 60%; exposing the photopolymer layer to patterned radiation to form an exposed photopolymer layer having a pattern of exposed photopolymer and a complementary pattern of unexposed photopolymer, wherein at least some of the acid- or alcohol-forming precursor groups in the exposed pattern react to form acid or alcohol groups; and contacting the exposed photopolymer layer with a developing solution comprising at least a first fluorinated solvent that dissolves the unexposed photopolymer thereby forming a developed structure having a first pattern of photopolymer covering the substrate and a complementary second pattern of uncovered substrate, the developing solution selected to provide a maximum photopolymer contrast in a range of 1.9 to 5.0. |
地址 |
Rochester NY US |