| 摘要 |
A piezoelectric device includes a first electrode film, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. At least one of the first and second electrode films is composed of an alloy, and a main component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn. The piezoelectric film has a main composition represented by (K1-x-y-w-vNaxLiyBawSrv)m(Nb1-z-uTazZru)O3 (1), where x, y, z, w, v, u, and m in formula (1) satisfy 0.4<x≦0.7, 0.02≦y≦0.11, 0.5≦x+y<0.75, 0<z≦0.28, 0<w≦0.02, 0.02≦v≦0.11, 0.02≦u≦0.11, and 0.95≦m<1.2, and contains 1% by mass or less of MnO relative to the main composition. |
| 主权项 |
1. A piezoelectric device comprising:
a first electrode film; a piezoelectric film disposed on the first electrode film; and a second electrode film disposed on the piezoelectric film, wherein an oxidation-reduction potential of a metal element constituting the first and second electrode films is higher than oxidation-reduction potentials of all metal elements constituting the piezoelectric film, and the piezoelectric film has a composition represented by formula (1) below and contains 1% by mass or less of MnO relative to the composition
(K1-x-y-w-vNaxLiyBawSrv)m(Nb1-z-uTazZru)O3 (1)where x, y, z, w, v, u, and m in formula (1) satisfy 0.4<x≦0.7, 0.02≦y≦0.11, 0.5≦x+y<0.75, 0<z≦0.28, 0<w≦0.02, 0.02≦v≦0.11, 0.02≦u≦0.11, and 0.95≦m<1.2. |
