发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device which includes an oxide semiconductor and in which formation of a parasitic channel due to a gate BT stress is suppressed is provided. Further, a semiconductor device including a transistor having excellent electrical characteristics is provided. The semiconductor device includes a transistor having a dual-gate structure in which an oxide semiconductor film is provided between a first gate electrode and a second gate electrode; gate insulating films are provided between the oxide semiconductor film and the first gate electrode and between the oxide semiconductor film and the second gate electrode; and in the channel width direction of the transistor, the first or second gate electrode faces a side surface of the oxide semiconductor film with the gate insulating film between the oxide semiconductor film and the first or second gate electrode.
申请公布号 WO2014185480(A1) 申请公布日期 2014.11.20
申请号 WO2014JP62900 申请日期 2014.05.08
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI, SHUNPEI;MIYAKE, HIROYUKI;OKAZAKI, KENICHI;HAYAKAWA, MASAHIKO;MATSUDA, SHINPEI
分类号 H01L29/786;G02F1/1368;G09F9/30;H01L21/28;H01L29/41;H01L29/423;H01L29/49;H01L51/50;H05B33/14 主分类号 H01L29/786
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