APPARATUS FOR MANUFACTURING GRAPHENE, THE MANUFACTURING METHOD USING THE SAME AND THE GRAPHENE MANUFACTURED BY THE SAME

摘要

The present invention relates to graphene and, more specifically, to an apparatus to manufacture high quality graphene, a manufacturing method, and the manufactured graphene by the method and the apparatus. According to the present invention, the apparatus to manufacture graphene comprises: a chamber including a gas inlet and a gas outlet where catalyst metal is loaded; and a thermal expansion compensation unit installed in the heating unit of the chamber and allowed to compensate the difference of thermal expansion between the graphene and a catalyst metal.