发明名称 Patterning non-planar surfaces
摘要 A system for forming a pattern on a part comprises a chamber base, a pressure vessel and a retaining device. The retaining device is positionable between the chamber base and the pressure vessel to secure a deformable mask therebetween. The system further comprises a first pressure source, a second pressure source and a third pressure source. The first pressure source provides a negative pressure within the chamber to draw the mask towards a part installed within the chamber base. The second pressure source provides a positive pressure within the pressure vessel to direct the mask towards the part so that the mask corresponds to at least one complex non-planar surface of the part. The third pressure source provides a negative pressure within pressure vessel. An exposure source exposes the part through the mask while the mask is deformed corresponding to the at least one complex non-planar surface of the part.
申请公布号 US8891065(B2) 申请公布日期 2014.11.18
申请号 US201113206770 申请日期 2011.08.10
申请人 Battelle Memorial Institute 发明人 Hogue Eric L.;Krak Stephen J.;Stanfield Timothy J.
分类号 G03F1/00;G03F7/20;G03F1/60;G03F7/24 主分类号 G03F1/00
代理机构 Thomas E. Lees, LLC 代理人 Thomas E. Lees, LLC
主权项 1. A system for forming a pattern on a non-planar surface of a part comprising: a chamber base; a pressure vessel; a retaining device that is positionable between the chamber base and the pressure vessel to secure a deformable mask therebetween, wherein a chamber is defined in the inside space of the chamber base and the pressure vessel; a first pressure source, which is coupled to the chamber base operable to provide a negative pressure within the chamber to draw the mask towards a part installed within the chamber base; a second pressure source, which is coupled to the pressure vessel to provide a positive pressure within the pressure vessel to direct the mask towards the part so that the mask corresponds to at least one complex non-planar surface of the part; a third pressure source, which is coupled to the pressure vessel to provide a negative pressure within pressure vessel to promote adjustment of the mask relative to the part, wherein an exposure source is utilized to expose the part through the mask while the mask is in a deformed state corresponding to the at least one complex non-planar surface of the part, using the first and second pressure sources; and a backing device that is inserted into the chamber and is pressed against the mask to assist in deforming the mask to correspond to the at least one complex non-planar surface of the part.
地址 Columbus OH US