Methods and Apparatuses for Specimen Lift-Out and Circuit Edit Using Needle Arrays

摘要

Embodiments of the present invention provide apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.

主权项

1. An apparatus of micromanipulation of a first specimen attached to a first base structure in a controlled space using a restorable tip on a microprobe, said apparatus comprising,
bonding said microprobe to a first freestanding nanoneedle in an array of freestanding nanoneedles, which stands out on a base substrate; cutting off from said base substrate said first freestanding nanoneedle attached to said base structure, hence leaving in place said tip on said microprobe attached to a micromanipulator and a second nanoneedle segment attached to said base substrate; bonding said tip to said first specimen; cutting or otherwise releasing said first specimen from said first base structure; moving said microprobe using said micromanipulator to displace said first specimen to a desired location; and cutting said tip to release said first specimen in said desired location.