| 发明名称 |
SUBSTRATE EVALUATION APPARATUS AND SUBSTRATE EVALUATION METHOD USING THE SAME |
| 摘要 |
A substrate evaluation apparatus and method which includes a substrate storage portion accommodating a substrate, first and second fastening portions are arranged in the substrate storage portion and are each fastened to a side of the substrate, a driving portion driving the first and second fastening portions, and a measurement portion measuring electrical characteristics of the substrate through application of an electrical signal to the substrate. |
| 申请公布号 |
US2014333333(A1) |
申请公布日期 |
2014.11.13 |
| 申请号 |
US201313960705 |
申请日期 |
2013.08.06 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
Seol Young Gug;Kim Tae Woong;Hwang Byeong Ung;Lee Nae Eung |
| 分类号 |
G01R31/28 |
主分类号 |
G01R31/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate evaluation apparatus comprising:
a substrate storage portion accommodating a substrate; a first fastening portion and a second fastening portion are arranged in the substrate storage portion and are each fastened to a side of the substrate; a driving portion driving the first fastening portion and the second fastening portion; and a measurement portion measuring electrical characteristics of the substrate through application of an electrical signal to the substrate. |
| 地址 |
Yongin-City KR |
