发明名称 |
Fabrication of nonpolar indium gallium nitride thin films, heterostructures, and devices by metalorganic chemical vapor deposition |
摘要 |
A method for the fabrication of nonpolar indium gallium nitride (InGaN) films as well as nonpolar InGaN-containing device structures using metalorganic chemical vapor deposition (MOVCD). The method is used to fabricate nonpolar InGaN/GaN violet and near-ultraviolet light emitting diodes and laser diodes. |
申请公布号 |
US8882935(B2) |
申请公布日期 |
2014.11.11 |
申请号 |
US201313909775 |
申请日期 |
2013.06.04 |
申请人 |
The Regents of the University of California;The Japan Science and Technology Agency |
发明人 |
Chakraborty Arpan;Haskell Benjamin A.;Keller Stacia;Speck James S.;DenBaars Steven P.;Nakamura Shuji;Mishra Umesh K. |
分类号 |
H01L33/16;H01L21/02;H01S5/343;B82Y20/00;H01L33/00;C30B29/40;C30B25/02;H01L33/06;H01S5/32;H01S5/02 |
主分类号 |
H01L33/16 |
代理机构 |
Gates & Cooper LLP |
代理人 |
Gates & Cooper LLP |
主权项 |
1. A p-n junction device structure, comprising at least:
nonpolar III-nitride layers, comprising at least one or more nonpolar oriented Indium-containing III-nitride layers, wherein a material quality of the nonpolar III-nitride layers enables the p-n junction device structure to function in response to direct current density between 43 amps per centimeter square and 222 Amps per centimeter square. |
地址 |
Oakland CA US |