发明名称 Fabrication of nonpolar indium gallium nitride thin films, heterostructures, and devices by metalorganic chemical vapor deposition
摘要 A method for the fabrication of nonpolar indium gallium nitride (InGaN) films as well as nonpolar InGaN-containing device structures using metalorganic chemical vapor deposition (MOVCD). The method is used to fabricate nonpolar InGaN/GaN violet and near-ultraviolet light emitting diodes and laser diodes.
申请公布号 US8882935(B2) 申请公布日期 2014.11.11
申请号 US201313909775 申请日期 2013.06.04
申请人 The Regents of the University of California;The Japan Science and Technology Agency 发明人 Chakraborty Arpan;Haskell Benjamin A.;Keller Stacia;Speck James S.;DenBaars Steven P.;Nakamura Shuji;Mishra Umesh K.
分类号 H01L33/16;H01L21/02;H01S5/343;B82Y20/00;H01L33/00;C30B29/40;C30B25/02;H01L33/06;H01S5/32;H01S5/02 主分类号 H01L33/16
代理机构 Gates & Cooper LLP 代理人 Gates & Cooper LLP
主权项 1. A p-n junction device structure, comprising at least: nonpolar III-nitride layers, comprising at least one or more nonpolar oriented Indium-containing III-nitride layers, wherein a material quality of the nonpolar III-nitride layers enables the p-n junction device structure to function in response to direct current density between 43 amps per centimeter square and 222 Amps per centimeter square.
地址 Oakland CA US