| 摘要 |
<p>A high efficiency plasma reactor including a plasma chamber coupled to a magnetic channel is provided to generate and maintain the high density plasma by increasing the transfer efficiency of inductively coupled energy coupled with the plasma. A first magnetic core block(20) has a magnetic outlet. A second magnetic core block(40) is positioned between magnetic outlets of the first magnetic core block and forms the magnetic channel with the first magnetic core block. In a plasma chamber(30), the discharge space is coupled in the magnetic channel. The first magnetic flux induction coil is wound around the first magnetic core block. The second magnetic flux induction coil is wound around the second magnetic core block. The power supply source supplies the AC power to the first and second magnetic flux induction coils. The AC potential forming the plasma in the discharge space of the plasma chamber is induced according to the change of the magnetic flux induced to the magnetic flux channel.</p> |
