| 摘要 |
<p>Disclosed are a magnet unit and a sputtering apparatus having the same. According to the present invention, the magnet unit comprises a yoke, a first magnet prepared in the form of a straight line, and a second magnet prepared to cover the first magnet on the yoke. Moreover, at least one between an angle and a gap between the first magnet and the second magnet is different from each other in at least two areas.</p> |
