发明名称 |
ELECTRON-BOMBARDED CHARGE-COUPLED DEVICE AND INSPECTION SYSTEMS USING EBCCD DETECTORS |
摘要 |
<p>A focusing EBCCD includes a control device positioned between a photocathode and a CCD. The control device has a plurality of holes therein, wherein the plurality of holes are formed perpendicular to a surface of the photocathode, and wherein a pattern of the plurality of holes is aligned with a pattern of pixels in the CCD. Each hole is surrounded by at least one first electrode, which is formed on a surface of the control device facing the photocathode. The control device may include a plurality of ridges between the holes. The control device may be separated from the photocathode by approximately half a shorter dimension of a CCD pixel or less. A plurality of first electrodes may be provided, wherein each first electrode surrounds a given hole and is separated from the given hole by a gap.</p> |
申请公布号 |
EP2791961(A1) |
申请公布日期 |
2014.10.22 |
申请号 |
EP20120857499 |
申请日期 |
2012.12.11 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
CHUANG, YUNG-HO ALEX;LIU, XUEFENG;FIELDEN, JOHN;BROWN, DAVID L. |
分类号 |
H01J31/26;G01N21/95;H01L27/14 |
主分类号 |
H01J31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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