Property testing apparatus of freestanding nanofilm using electrowetting

摘要

The present invention relates to a device and a method for testing physical properties of a freestanding nanofilm using an electrowetting phenomenon. More specifically, the freestanding nanofilm is formed on a substrate on which holes are formed. On an inner side of the hole, an electrode layer and an insulation layer are formed. Electrolyte is contained in the inner side of the hole. Electric power is applied to the electrode layer and the electrolyte. A contact angle between the electrolyte and the insulation layer which varies according to voltages applied is used to calculate pressure of the inside of the electrolyte. Thereby, a degree of deformation of the freestanding nanofilm can be measured to test the physical properties such as residual stress, tensile strength, elastic modulus, or a Poisson′s ratio of the nanofilm.