发明名称 FILM FORMING MASK
摘要 <p>The present invention is a film forming mask (1) that has the following configuration: a resin film (3) is tightly adhered to one surface of a sheet-shaped magnetic metal member (2) that has a plurality of slit-shaped through holes (5) arranged in parallel. The film forming mask (1) has a plurality of opening patterns (6) that penetrate the portions of the film (3) that are within the through holes (5). The film (3) has anisotropic properties such that perpendicular axes have different linear coefficients of expansion, and the smaller linear coefficient of expansion axis of the film (3) is aligned with the direction that intersects the longitudinal axis of the through holes (5) of the magnetic metal member (2).</p>
申请公布号 WO2014168039(A1) 申请公布日期 2014.10.16
申请号 WO2014JP59523 申请日期 2014.03.31
申请人 V TECHNOLOGY CO., LTD. 发明人 MIZUMURA, MICHINOBU;KUDO, SYUJI;KAJIYAMA, KOICHI
分类号 C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/24
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