发明名称 |
FILM FORMING MASK |
摘要 |
<p>The present invention is a film forming mask (1) that has the following configuration: a resin film (3) is tightly adhered to one surface of a sheet-shaped magnetic metal member (2) that has a plurality of slit-shaped through holes (5) arranged in parallel. The film forming mask (1) has a plurality of opening patterns (6) that penetrate the portions of the film (3) that are within the through holes (5). The film (3) has anisotropic properties such that perpendicular axes have different linear coefficients of expansion, and the smaller linear coefficient of expansion axis of the film (3) is aligned with the direction that intersects the longitudinal axis of the through holes (5) of the magnetic metal member (2).</p> |
申请公布号 |
WO2014168039(A1) |
申请公布日期 |
2014.10.16 |
申请号 |
WO2014JP59523 |
申请日期 |
2014.03.31 |
申请人 |
V TECHNOLOGY CO., LTD. |
发明人 |
MIZUMURA, MICHINOBU;KUDO, SYUJI;KAJIYAMA, KOICHI |
分类号 |
C23C14/24;H01L51/50;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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