| 发明名称 |
SYSTEM FOR SEPARATELY HANDLING DIFFERENT SIZE FOUPS |
| 摘要 |
A system for separately handling different size FOUPs includes an end effector having a surface thereon for supporting a FOUP. The end effector and surface is configured to support different size FOUPs. A fixture or means for engaging and maintaining a FOUP, of different size FOUPs, included to position and maintain each of a different size FOUP on the end effector during transport thereof. A shelf is configured to receive each of said different size FOUPs. The end effector is thus capable of transporting either a first size FOUP or a second, smaller size FOUP. |
| 申请公布号 |
US2014308108(A1) |
申请公布日期 |
2014.10.16 |
| 申请号 |
US201313859773 |
申请日期 |
2013.04.10 |
| 申请人 |
GLOBALFOUNDRIES INC. |
发明人 |
FOSNIGHT William J.;GALLAGHER Ryan J.;MINER Stephen B. |
| 分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for separately handling different size FOUPs comprising:
an end effector having a surface thereon for supporting a FOUP, said end effector and surface being configured to support different size FOUPs; a fixture coupled to the surface of said end effector, said fixture configured to engage each of said different size FOUPs and maintain each of said different size FOUPs in position on said end effector during transport thereof; and a shelf configured to receive each of said different size FOUPs. |
| 地址 |
Grand Cayman KY |
