| 摘要 |
<p>An X-ray analyzer is provided that rapidly obtain element distribution covering as much as possible elements contained in a sample. The X-ray analyzer generates a spectrum of X-rays obtained from an area on a sample S where the intensity of X-rays whose energy is not included in an already set-up ROI is high and then, from the generated spectrum, identifies a new element for which an ROI is not set up. Further, the X-ray analyzer sets an ROI corresponding to the identified element and then obtains element distribution. The X-ray analyzer repeats generation of an X-ray spectrum, identification of an element, setting of an ROI, and obtaining element distribution. This avoids unintended omission of setting of an ROI and hence permits as-much-as-possible coverage of the elements in the sample S. Further, distribution of a trace element is allowed to be obtained rapidly.</p> |
