SOLAR CELL, METHOD AND APPARATUS FOR FABRICATION OF THE SOLAR CELL

摘要

PURPOSE: A solar cell and a method and an apparatus for manufacturing the same are provided to reduce the reflectivity of the surface of a semiconductor substrate by forming a fine concave-convexo pattern on the surface. CONSTITUTION: A semiconductor substrate(10) is loaded in a chamber. Plasma is generated using a reactive gas and high frequency. The reactive gas is composed of chloride/boron tri-chloride/oxygen gas or chloride/phosphorus tri-chloride/oxygen gas. The semiconductor substrate is etched using the plasma in order to form a concave-convexo pattern(12) on the surface.