| 摘要 |
PROBLEM TO BE SOLVED: To facilitate manufacturing of a laminated piezoelectric actuator provided with a displacement magnification mechanism, and to eliminate an external electrode becoming the cause of a restraining area, in a double spiral lamination piezoelectric actuator and a manufacturing method therefor.SOLUTION: Two spiral lamination structures each having a lower electrode, a piezoelectric and an upper electrode laminated sequentially, and including a gap in at least one of the lower electrode and upper electrode are prepared. A double spiral structure is obtained by bonding two spiral lamination structures so that the lower and upper electrodes are superposed at the junction. |
