PROBE ASSEMBLY AND PROBE BASE PLATE

摘要

A probe assembly includes a wiring base plate arranged on a lower surface side of a reinforcing plate and a probe base plate arranged on a lower surface side of the wiring base plate. The probe base plate includes a plurality of probes on a lower surface thereof and a plurality of anchor portions on an upper surface thereof, respectively. The anchor portions are set so that a height of the anchor portion arranged at a center portion of the probe base plate may be greater than a height of the anchor portion located at a peripheral portion of the probe base plate. Between the respective anchor portions and the reinforcing plate are arranged a plurality of brace portions corresponding to the plurality of anchor portions and determining a space between the probe base plate and the wiring base plate together with the anchor portions.

主权项

1. A probe assembly comprising:
a reinforcing plate; a wiring base plate arranged on a lower surface side of the reinforcing plate; a probe base plate having an upper surface and a lower surface, arranged on a lower surface side of the wiring base plate, including a plurality of probes formed on the lower surface of the probe base plate and a plurality of anchor portions formed on the upper surface of the probe base plate, respectively, and arranging the plurality of anchor portions so that a height of the anchor portion arranged at a center portion of the probe base plate may be greater than a height of the anchor portion located at a peripheral portion of the probe base plate in a planar view; an elastic connector arranged between the wiring base plate and the probe base plate and electrically connecting the wiring base plate to the plurality of probes; and a plurality of brace portions arranged between the plurality of anchor portions and the reinforcing plate to correspond to the plurality of anchor portions and determining a space between the probe base plate and the wiring base plate together with the plurality of anchor portions.