| 发明名称 |
APPARATUS AND METHOD FOR PRODUCING SOLAR CELLS |
| 摘要 |
A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. |
| 申请公布号 |
US2014302634(A1) |
申请公布日期 |
2014.10.09 |
| 申请号 |
US201414311388 |
申请日期 |
2014.06.23 |
| 申请人 |
TSMC SOLAR LTD. |
发明人 |
TENG Edward;CHAO Ying-Chen;YANG Chih-Jen;HSIAO Kuo-Jui |
| 分类号 |
H01L31/18;H01L21/67;H01L21/02;H01L31/032 |
主分类号 |
H01L31/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for forming a solar cell, comprising:
a housing defining a vacuum chamber; a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces; a first sputtering source configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates; and an evaporation source configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. |
| 地址 |
Taichung City TW |
