| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an illumination optical system advantageous for efficiently illuminating a surface to be illuminated using light from a plurality of light sources.SOLUTION: This illumination optical system for illuminating the surface to be illuminated using the plurality of light sources has a plurality of optical systems disposed correspondingly to each of the plurality of light sources, a synthesizing system for leading light from each of the plurality of optical systems to a conjugate plane optically conjugate with the surface to be illuminated, and an illumination system disposed between the conjugate plane and the surface to be illuminated. As for a plurality of illumination regions formed on the conjugate plane by light from each of the plurality of light sources through the plurality of optical systems and the synthesizing system, the plurality of optical systems and the synthesizing system are formed so that the region has a non-circular shape, and falls in an effective region on the conjugate plane, and the effective region is a region where the illumination systems can take in light for illuminating the surface to be illuminated, among regions on the conjugate plane.</p> |
