VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF THE SAME

摘要

A vacuum processing apparatus including an atmospheric transfer chamber including on a front side a plurality of cassette stages on which cassettes having stored samples as processing objects are to be mounted, a first transfer chamber which is disposed via a lock chamber on a back side of the atmospheric transfer chamber and to which a sample decompressed to first pressure is transferred, a second transfer chamber which is disposed on a back side of the first transfer chamber and to which the sample is transferred via a relay chamber from the first transfer chamber, a first processing vessel which is coupled to the first transfer chamber and in which the sample is transferred under the first pressure, and a second processing vessel which is coupled to the second transfer chamber and in which the sample is transferred under the second pressure.

主权项

1. A vacuum processing apparatus, comprising:
an atmospheric transfer chamber including on a front side thereof a plurality of cassette stages on which cassettes having stored therein samples as processing objects are to be mounted; a first transfer chamber disposed on a back side of the atmospheric transfer chamber, the first transfer chamber comprising an inside, any one of the samples transferred through a lock chamber being transferred through the inside decompressed to first pressure; a second transfer chamber disposed on a back side of the first transfer chamber and coupled to the first transfer chamber via a relay chamber capable of adjusting pressure thereof, the second transfer chamber comprising an inside, the sample transferred from the first transfer chamber being transferred through the inside decompressed to second pressure; a first processing vessel coupled to the first transfer chamber, the first processing vessel comprising an inside and a processing chamber therein, the sample being transferred to the processing chamber in the inside set to the first pressure and being processed therein; and a second processing vessel coupled to the second transfer chamber, the second processing vessel comprising an inside and a processing chamber therein, the sample being transferred to the processing chamber in the inside set to the second pressure and being processed therein.