CONVERSING ION BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To enable obtaining a broad FIM image at an end of an emitter and perform broad FIM observation.SOLUTION: A conversing ion beam apparatus comprises: a gas electric field ionizing ion source 10; an ion gun portion 11 that accelerates gas ions toward a sample S and irradiates the sample S with the accelerated gas ions as an ion beam 3A; a beam optical system 12 that includes at least a conversing lens electrode 35 and irradiates the sample S with the ion beam 3A while conversing it; and an image acquiring mechanism 14 that acquire FIM images at an end of the emitter 20. The image acquiring mechanism 14 includes: an alignment electrode 32 that adjusts an ion beam irradiation direction; an alignment controller 46 that applies an alignment voltage on the alignment electrode 32; a storage unit 45 that stores the acquired FIM images; and an image processing unit 47 that creates one combined FIM image by mutually combining, among the FIM images stored in the storage unit 45, plural FIM images acquired when different alignment voltages are applied.