发明名称 CALIBRATABLE BEAM SHAPING SYSTEM AND METHOD
摘要 A beam forming system comprises first and second optical modules which are received having a space at an optical path of light through a system to apply beam forming to incident light in order. The beam forming system comprises first and second alignment modules which transport the first and second optical modules and can be operated that the optical modules are located horizontally for the optical path. A calibration module of the beam forming system can be connected to the first and second alignment modules and be operated that horizontal locations of the first and second optical modules are calibrated and arranged in order. The system can form output light in which a predetermined wave front given and the beam forming of the incident light of transverse intensity distribution have a desired wave front and desired transverse intensity distribution.
申请公布号 KR20140115916(A) 申请公布日期 2014.10.01
申请号 KR20130086142 申请日期 2013.07.22
申请人 APPLIED MATERIALS ISRAEL, LTD. 发明人 KIRSHNER BINYAMIN;EDER HAIM
分类号 H01S3/10 主分类号 H01S3/10
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