发明名称 MANUFACTURING METHOD OF SAPPHIRE SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a sapphire single crystal which generates no bubble group when the sapphire single crystal is grown.SOLUTION: In a growth furnace for growing a sapphire single crystal, which includes a crucible, a heater, and heat insulation material, a falling object from the heat insulation material is prevented by providing a shield material made of high-melting-point metal having a melting point of 2100°C or more between the heat insulation material and a side part and an upper part of the crucible. This allows manufacturing of the sapphire single crystal not having the bubble group, and a yield of a sapphire substrate from a straight barrel can be improved.
申请公布号 JP2014181146(A) 申请公布日期 2014.09.29
申请号 JP20130055865 申请日期 2013.03.19
申请人 TOKUYAMA CORP 发明人 MIYAHARA HOSHI;MATSUO KENTARO;KUBU SHINICHI
分类号 C30B29/16 主分类号 C30B29/16
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