发明名称 GRAPHENE WIRING AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To suppress CNT growth from the uppermost surface.SOLUTION: Graphene wiring according to an embodiment comprises: a substrate; a catalyst layer on the substrate; a first graphene sheet layer on the catalyst layer; and a second graphene sheet layer on the first graphene layer. The second graphene layer is formed of a multi-layer graphene sheet, and atoms or molecules exist between layers of the multi-layer graphene sheet.</p>
申请公布号 JP2014183212(A) 申请公布日期 2014.09.29
申请号 JP20130057006 申请日期 2013.03.19
申请人 TOSHIBA CORP 发明人 MIYAZAKI HISAO;SAKAI TADASHI;KATAGIRI MASAYUKI;YAMAZAKI YUICHI;SUZUKI MARIKO
分类号 H01L21/3205;H01B5/14;H01B13/00;H01L21/28;H01L21/285;H01L21/768;H01L23/532 主分类号 H01L21/3205
代理机构 代理人
主权项
地址