发明名称 |
GRAPHENE WIRING AND METHOD OF MANUFACTURING THE SAME |
摘要 |
<p>PROBLEM TO BE SOLVED: To suppress CNT growth from the uppermost surface.SOLUTION: Graphene wiring according to an embodiment comprises: a substrate; a catalyst layer on the substrate; a first graphene sheet layer on the catalyst layer; and a second graphene sheet layer on the first graphene layer. The second graphene layer is formed of a multi-layer graphene sheet, and atoms or molecules exist between layers of the multi-layer graphene sheet.</p> |
申请公布号 |
JP2014183212(A) |
申请公布日期 |
2014.09.29 |
申请号 |
JP20130057006 |
申请日期 |
2013.03.19 |
申请人 |
TOSHIBA CORP |
发明人 |
MIYAZAKI HISAO;SAKAI TADASHI;KATAGIRI MASAYUKI;YAMAZAKI YUICHI;SUZUKI MARIKO |
分类号 |
H01L21/3205;H01B5/14;H01B13/00;H01L21/28;H01L21/285;H01L21/768;H01L23/532 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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