发明名称 SHEET ADHERING DEVICE AND ADHERING METHOD
摘要 A sheet attaching device (1) includes a holding and supporting means (2) holding and supporting an adhesive sheet (AS) and a pressurization means (3) pressurizing and attaching the adhesive sheet (AS) to an attached material (WF). The holding and supporting means (2) includes an elastically transformable holding and supporting member (21) and an electrode (22) installed in the holding and supporting member (21). By applying a voltage to the electrode (22), the holding and supporting member (21) is installed to hold and support the adhesive sheet (AS). The pressurization means (3) is installed to pressurize the adhesive sheet (AS) to the attached material (WF) by the holding and supporting member (21) by elastically transforming the holding and supporting member (21).
申请公布号 KR20140114768(A) 申请公布日期 2014.09.29
申请号 KR20140030153 申请日期 2014.03.14
申请人 LINTEC CORPORATION 发明人 NAKATA KAN
分类号 H01L21/20;H01L21/683 主分类号 H01L21/20
代理机构 代理人
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