| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical deflector facilitating manufacture, enhancing shock resistance and suppressing an occurrence of a nonnormal natural vibration mode.SOLUTION: An optical deflector 1 is configured to drive a mirror part 2 around an axis by a pair of meandering actuators 4a and 4b facingly disposed at both sides of the mirror part 2. Each of the meandering actuators 4a and 4b includes: a plurality of cantilevers 11a-11d that are juxtaposed, with the end parts thereof adjacent to each other and curvedly deformed by piezoelectric drive; and folding-back parts 12a-12c that are mechanically connected to fold back the adjacent end parts of the cantilevers 11a-11d and set at symmetrical positions in both sides of the mirror part 2. At least a pair of folding-back parts 12c of the folding-back parts set at the symmetrical positions in the pair of meandering actuators 4a and 4b are connected by a connecting beam 15. |
