发明名称 SUBSTRATE-PRODUCT SUBSTRATE COMBINATION AS WELL AS DEVICE AND PROCESS FOR PRODUCING A SUBSTRATE-PRODUCT SUBSTRATE COMBINATION
摘要 <p>The invention relates to a substrate for producing a substrate-product substrate combination by aligning, bringing into contact, and bonding a contact side of the large-area substrate to a support surface of a carrier substrate, whereby the substrate has a diameter d1, which can be reduced during back-thinning.</p>
申请公布号 SG2014012934(A) 申请公布日期 2014.09.26
申请号 SG20140012934 申请日期 2012.06.12
申请人 THALLNER, ERICH 发明人 THALLNER, ERICH
分类号 H01L21/683;H01L21/68 主分类号 H01L21/683
代理机构 代理人
主权项
地址