发明名称 |
COORDINATION OF BEAM ANGLE AND WORKPIECE MOVEMENT FOR TAPER CONTROL |
摘要 |
The angle of incidence (ω) and azimuth (&phgr;) of a beam axis (32) can be moved relative to a workpiece (22) to provide desirable taper characteristics to a side wall (124) of a resulting kerf (120) produced by a focused laser beam (30) propagated along the beam axis (32). |
申请公布号 |
WO2014150604(A1) |
申请公布日期 |
2014.09.25 |
申请号 |
WO2014US23766 |
申请日期 |
2014.03.11 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
ZHANG, HAIBIN |
分类号 |
B23K26/36;B23K26/0622 |
主分类号 |
B23K26/36 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|