| 摘要 |
Disclosed is an invention relating to a substrate transferring device and a substrate transferring method. The disclosed substrate transferring device includes: a substrate insertion unit which supplies a substrate having a non-contact surface and a contact surface while supporting the contact surface; a delivery unit which supports the contact surface and floats and moves the substrate supported by the substrate insertion unit; and a reversing unit which adsorb the contact surface of the substrate, and reverses the substrate supported by the delivery unit. |
