| 摘要 |
PROBLEM TO BE SOLVED: To increase a preload applied to a sensor part while suppressing reduction in detection accuracy.SOLUTION: A metal case 20 is made to have a bottomed cylinder shape, and a diaphragm part 20b is constituted by a bottom part of the bottomed cylinder. The metal case 20 is covered with a diaphragm part 20b and exposed to a measurement medium, and includes a metal diaphragm 100 for transmitting a pressure of the measurement medium to the diaphragm part 20b. According to this constitution, a portion for supporting a preload applied from a preload applying member 30 and a portion for receiving the pressure of the measurement medium are constituted by different members. Consequently, even if a film thickness of the diaphragm part 20b is made thick so as to enable a large preload to be supported by a sensor part 50, the diaphragm part 20b is not exposed to the measurement medium, and less affected by heat distortion (temperature). Accordingly, it is possible to increase a preload applied to the sensor part 50 while suppressing reduction in detection accuracy. |
