CARRIER FOR A SUBSTRATE AND METHOD FOR CARRYING A SUBSTRATE

摘要

A carrier (200; 300; 400) for carrying a substrate (210; 310) in a deposition chamber is described. The carrier includes a frame (240; 250; 260; 270; 340; 350; 360; 370; 440; 450; 460; 470) for vertically holding the substrate (210; 310), wherein the frame has a substantially rectangular shape with a bottom frame part (240; 340; 440); a fixing means (225; 325) for firmly fixing the substrate (210; 310) to the carrier (200; 300; 400), wherein the fixing means (225; 325) is located in a center region of the bottom frame part (240; 340; 440); and one or more support members (220; 230; 320) for supporting but not firmly fixing the substrate (210; 310). Further, a method for carrying a substrate during deposition is described.