发明名称 |
GAS SLEEVE FOR FORELINE PLASMA ABATEMENT SYSTEM |
摘要 |
Methods and apparatus for protecting an inner wall of a foreline of a substrate processing system are provided herein. In some embodiments, an apparatus for treating an exhaust gas in a foreline of a substrate processing system includes a gas sleeve generator including a gas sleeve generator comprising a body having a central opening disposed through the body; a plenum disposed within the body and surrounding the central opening; an inlet coupled to the plenum; and an annulus coupled at a first end to the plenum and forming an annular outlet at a second end opposite the first end, wherein the annular outlet is concentric with and open to the central opening. The gas sleeve generator may be disposed upstream of a foreline plasma abatement system to provide a sleeve of a gas to a foreline of a substrate processing system. |
申请公布号 |
US2014262033(A1) |
申请公布日期 |
2014.09.18 |
申请号 |
US201414184667 |
申请日期 |
2014.02.19 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
HERBERT ANDREW;DICKINSON COLIN JOHN |
分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
1. An apparatus for treating an exhaust gas in a foreline of a substrate processing system, comprising:
a gas sleeve generator comprising a body having a central opening disposed through the body; a plenum disposed within the body and surrounding the central opening; an inlet coupled to the plenum; and an annulus coupled at a first end to the plenum and forming an annular outlet at a second end opposite the first end, wherein the annular outlet is concentric with and open to the central opening. |
地址 |
Santa Clara CA US |